Multibeam

Multibeam

Electron beam lithography systems for advanced manufacturing.

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Multibeam Corporation specializes in the development and manufacturing of multibeam electron beam lithography (MEBL) systems for the semiconductor industry. Founded in 2010 by Dr. David K. Lam, an inductee into the Silicon Valley Engineering Hall of Fame and the founder of Lam Research, the company aims to address the challenges of advanced semiconductor manufacturing at 7nm nodes and beyond. Dr. Lam's extensive background in the semiconductor equipment industry, particularly in plasma etching technology, provides a strong foundation for Multibeam's direction.

The company's core technology, MEBL, offers a high-speed, direct-write alternative to traditional optical lithography, which faces increasing complexity and cost at smaller process nodes. Multibeam's systems are designed to improve throughput and cost-effectiveness for fabricating integrated circuits and other nano-devices. This technology is particularly suited for clients in advanced chip manufacturing, including foundries and integrated device manufacturers who require precise and efficient patterning for next-generation electronics.

Multibeam's business model revolves around the sale of these complex lithography systems and associated services. The company has secured significant funding, including a Series C round led by M-Ventures, the corporate venture capital arm of Merck KGaA, Darmstadt, Germany, to accelerate its growth and commercialization efforts. The company's technology has been recognized with projects funded by organizations like the U.S. Army Research Laboratory, highlighting its potential impact on both commercial and defense applications.

Keywords: multibeam electron beam lithography, semiconductor manufacturing, MEBL systems, direct-write lithography, nano-fabrication, advanced packaging, integrated circuits, semiconductor equipment, nano-devices, chip manufacturing

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