Microworks

Microworks GmbH is a manufacturer of standardized and custom micro-fabricated products for X-ray non-destructive testing (NDT) and quality control. Founded in 2007 as a spin-off from the Institute of Microstructure Technology (IMT) at the Karlsruhe Institute of Technology (KIT) in Germany, the company leverages high-precision microfabrication techniques. The founder, Joachim Schulz, handed over management to Dr. Florian Döring in the fall of 2024 following the acquisition of Microworks by the Swiss company XRnanotech, which Döring also runs. Schulz has since moved into a Senior Advisor role.

The company’s core technology is Deep X-ray Lithography (a LIGA process), which enables the production of microstructures with very high aspect ratios and precision below one micrometer. This process involves creating polymer microstructures which are then used for electroplating to produce metal microstructures. Initially, the firm produced high-end watch parts before expanding its offerings. Its product portfolio now includes X-ray optical components such as gratings, interferometers, apertures, beamstops, X-ray lenses, and resolution targets. A key product is TALINT, a modular grating-based X-ray interferometer that provides absorption, phase-contrast, and dark-field imaging modes for detailed analysis.

Microworks serves a primary client base of researchers and educational institutions and aims to expand its reach to industrial customers. The company controls its entire production chain, from layout and mask-making to lithography and electroplating. In October 2024, Microworks was acquired by XRnanotech, a Swiss high-tech company and spin-off from the Paul Scherrer Institute. The acquisition aims to combine the technical expertise of both firms, expand the product range in the micrometer range, and provide customized solutions for new applications in areas like X-ray imaging, optical communications, and the semiconductor sector.

Keywords: X-ray non-destructive testing, microfabrication, X-ray lithography, LIGA technology, X-ray optical components, microstructures, X-ray gratings, X-ray interferometers, TALINT, electroplating, Karlsruhe Institute of Technology, micro-optics, deep X-ray lithography, X-ray quality control, precision manufacturing, nanostructures, X-ray lenses, beamstops, resolution targets, apertures