Integrated Materials

Integrated Materials, Inc. operates as a specialized unit within Ferrotec (USA) Corporation, focusing on advanced materials for the semiconductor manufacturing sector. The company was acquired by Ferrotec in a strategic move to enhance its portfolio with patented process technology. Integrated Materials is centered around its SiFusion® process, a method for producing high-purity polysilicon furnaceware.

The core of the business is the manufacturing and supply of SiFusion® components, which are used in the front-end thermal processing stages of semiconductor fabrication. These components, such as boats, injectors, and pedestals, are constructed from 99.9999% pure polysilicon material. The primary benefit of using pure silicon parts is that their coefficient of thermal expansion exactly matches that of the silicon wafers being processed, which reduces particle generation and contamination. This leads to lower maintenance requirements and a reduced total cost of ownership for clients. The products are designed for easy installation in the furnace hot zones of major original equipment manufacturers (OEMs) like Tokyo Electron (TEL), KE, and ASM. The clientele consists of wafer fabs, foundries, and semiconductor equipment manufacturers.

Historically, Integrated Materials was a startup that developed the proprietary SiFusion® technology. Recognizing the resource and infrastructure challenges that limited its growth, the company was acquired by Ferrotec in July 2010. Dan Rubin served as the President and CEO of Integrated Materials at the time of the acquisition. This integration allowed the SiFusion® technology to leverage Ferrotec's extensive global manufacturing infrastructure and established relationships with leading semiconductor manufacturers. Following the acquisition, the manufacturing base for these products was established in Hangzhou, China, with mass production of 12-inch polysilicon boats beginning in 2011. In 2018, the Chinese subsidiary, Hangzhou Dunyuan Juxin Semiconductor Technology Co., Ltd., which now holds the SiFusion® brand, was formally established.

Keywords: polysilicon furnaceware, SiFusion, semiconductor manufacturing, thermal processing, silicon components, wafer fab consumables, advanced materials, silicon boats, silicon injectors, high-purity silicon, front-end processing, semiconductor consumables, original equipment manufacturer parts, furnace components, polysilicon parts, process contamination control, cost of ownership reduction, wafer processing equipment, high temperature anneal boats, semiconductor materials